High-Resolution Blue-Laser Mastering Using an Inorganic Photoresist
Kouchiyama, Akira, Aratani, Katsuhisa, Takemoto, Yoshihiro, Nakao, Takashi, Kai, Shinichi, Osato, Kiyoshi, Nakagawa, KenzoVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.769
Date:
February, 2003
File:
PDF, 250 KB
english, 2003