Fullerene Resist Materials for the 32 nm Node and Beyond
Francis P. Gibbons, Alex P. G. Robinson, Richard E. Palmer, Sara Diegoli, Mayandithevar Manickam, Jon A. PreeceVolume:
18
Year:
2008
Language:
english
Pages:
6
DOI:
10.1002/adfm.200701155
File:
PDF, 250 KB
english, 2008