A General Approach to Semimetallic, Ultra-High-Resolution,...

Advanced Functional Materials 2009 Vol. 19; Iss. 9

A General Approach to Semimetallic, Ultra-High-Resolution, Electron-Beam Resists

Bao-Yu Zong, Gu-Chang Han, Yuan-Kai Zheng, Li-Hua An, Tie Liu, Ke-Bin Li, Jin-Jun Qiu, Zai-Bing Guo, Ping Luo, Hao-Min Wang, Bo Liu
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Volume:
19
Year:
2009
Language:
english
Pages:
7
DOI:
10.1002/adfm.200800939
File:
PDF, 464 KB
english, 2009
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