Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching
Shih-Wei Chang, Vivian P. Chuang, Steven T. Boles, Caroline A. Ross, Carl V. ThompsonVolume:
19
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/adfm.200900181
File:
PDF, 693 KB
english, 2009