Structural and Electrical Properties of Atomic Layer...

Advanced Functional Materials 2011 Vol. 21; Iss. 3

Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films

Do-Joong Lee, Hyun-Mi Kim, Jang-Yeon Kwon, Hyoji Choi, Soo-Hyun Kim, Ki-Bum Kim
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Volume:
21
Year:
2011
Language:
english
Pages:
8
DOI:
10.1002/adfm.201001342
File:
PDF, 515 KB
english, 2011
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