Ultrathin TiN Membranes as a Technology Platform for...

Advanced Functional Materials 2011 Vol. 21; Iss. 9

Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices

M. Birkholz, K.-E. Ehwald, P. Kulse, J. Drews, M. Fröhlich, U. Haak, M. Kaynak, E. Matthus, K. Schulz, D. Wolansky
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Volume:
21
Year:
2011
Language:
english
Pages:
5
DOI:
10.1002/adfm.201002062
File:
PDF, 653 KB
english, 2011
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