Wafer-Level Self-Organized Copolymer Templates for...

Advanced Functional Materials 2011 Vol. 21; Iss. 6

Wafer-Level Self-Organized Copolymer Templates for Nanolithography with Sub-50 nm Feature and Spatial Resolutions

Sivashankar Krishnamoorthy, Krishna Kumar Manipaddy, Fung Ling Yap
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Volume:
21
Year:
2011
Language:
english
Pages:
11
DOI:
10.1002/adfm.201002380
File:
PDF, 892 KB
english, 2011
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