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Reaction pathways in organometallic chemical vapor deposition(OMCVD)
Dr. Alfred Zinn, Dr. Burkhard Niemer, Prof. Herbert D. KaeszVolume:
4
Year:
1992
Language:
english
Pages:
4
DOI:
10.1002/adma.19920040514
File:
PDF, 426 KB
english, 1992