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Room temperature silicon wafer bonding with ultra-thin polymer films
Dr. Gertrud Kräuter, Andreas Schumacher, Ulrich Gösele, Thomas Jaworek, Prof. Gerhard WegnerVolume:
9
Year:
1997
Language:
english
Pages:
4
DOI:
10.1002/adma.19970090512
File:
PDF, 334 KB
english, 1997