Defects in amorphous Si-N films prepared by RF sputtering

Solar Energy Materials 1982 Vol. 8; Iss. 1-3

Defects in amorphous Si-N films prepared by RF sputtering

Tatsuo Shimizu, Shizuo Oozora, Akiharu Morimoto, Minoru Kumeda, Nobuhiko Ishii
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Volume:
8
Year:
1982
Language:
english
Pages:
7
DOI:
10.1016/0165-1633(82)90074-0
File:
PDF, 299 KB
english, 1982
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