TiN films prepared by nitrogen implantation on Ti-coated fused SiO2
M. Erola, J. Keinonen, A. Anttila, J. KoskinenVolume:
12
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0165-1633(85)90005-x
File:
PDF, 351 KB
english, 1985