Glow discharge deposited a-Si:H,Al thin films
J.L. Andújar, J. Andreu, G. Sardin, J.C. Delgado, J. Esteve, J.L. MorenzaVolume:
15
Year:
1987
Language:
english
Pages:
7
DOI:
10.1016/0165-1633(87)90063-3
File:
PDF, 325 KB
english, 1987