The effect of target erosion and RF substrate biasing on the properties of reactively sputtered ITO films
J.N. Avaritsiotis, D.K. Sivridis, E. RoditiVolume:
15
Year:
1987
Language:
english
Pages:
9
DOI:
10.1016/0165-1633(87)90097-9
File:
PDF, 393 KB
english, 1987