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Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
D.J. Sirbuly, G.M. Lowman, B. Scott, G.D. Stucky, S.K. BurattoVolume:
15
Year:
2003
Language:
english
Pages:
4
DOI:
10.1002/adma.200390031
File:
PDF, 159 KB
english, 2003