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IR laser-induced decomposition of tetravinylsilane for chemical vapour deposition of Si/C/H materials
Vladislav Dřínek, Zdeněk Bastl, Jan Šubrt, Roger Taylor, Josef PolaVolume:
35
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0165-2370(95)00909-0
File:
PDF, 386 KB
english, 1995