Employing Thin-Film Delamination for the Formation of...

Advanced Materials 2006 Vol. 18; Iss. 8

Employing Thin-Film Delamination for the Formation of Shadow Masks for Nanostructure Fabrication

M. Elbahri, S. K. Rudra, S. Wille, S. Jebril, M. Scharnberg, D. Paretkar, R. Kunz, H. Rui, A. Biswas, R. Adelung
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Volume:
18
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/adma.200502187
File:
PDF, 330 KB
english, 2006
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