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Book Review: Enabling Technologies for MEMS and Nanodevices. By H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, O. Tabata (Eds.).
Vladimir TsukrukVolume:
17
Year:
2005
Language:
english
Pages:
2
DOI:
10.1002/adma.200590096
File:
PDF, 142 KB
english, 2005