The influence of argon ion bombardment on the electrical...

The influence of argon ion bombardment on the electrical and optical properties of clean silicon surfaces

J.W.D. Martens, W.F. Van den Bogert, A. Van Silfhout
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Volume:
105
Year:
1981
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(81)90435-7
File:
PDF, 67 KB
english, 1981
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