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The influence of argon ion bombardment on the electrical and optical properties of clean silicon surfaces
J.W.D. Martens, W.F. Van den Bogert, A. Van SilfhoutVolume:
105
Year:
1981
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(81)90435-7
File:
PDF, 67 KB
english, 1981