High-Throughput and Etch-Selective Nanoimprinting and...

High-Throughput and Etch-Selective Nanoimprinting and Stamping Based on Fast- Thermal-Curing Poly(dimethylsiloxane)s

C. Pina-Hernandez, J.-S. Kim, L. J. Guo, P.-F. Fu
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Volume:
19
Year:
2007
Language:
english
Pages:
6
DOI:
10.1002/adma.200601905
File:
PDF, 364 KB
english, 2007
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