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The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography
H. W. Ro, R. L. Jones, H. Peng, D. R. Hines, H.-J. Lee, E. K. Lin, A. Karim, D. Y. Yoon, D. W. Gidley, C. L. SolesVolume:
19
Year:
2007
Language:
english
Pages:
6
DOI:
10.1002/adma.200602872
File:
PDF, 493 KB
english, 2007