The Direct Patterning of Nanoporous Interlayer Dielectric...

The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography

H. W. Ro, R. L. Jones, H. Peng, D. R. Hines, H.-J. Lee, E. K. Lin, A. Karim, D. Y. Yoon, D. W. Gidley, C. L. Soles
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Volume:
19
Year:
2007
Language:
english
Pages:
6
DOI:
10.1002/adma.200602872
File:
PDF, 493 KB
english, 2007
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