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A new method for ellipsometric inversion with microcomputers: Characterization of optically absorbing films using multiple-angle-of-incidence
T. Easwarakhanthan, P. Mas, M. Renard, S. RaveletVolume:
216
Year:
1989
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(89)90874-8
File:
PDF, 87 KB
english, 1989