Diagnosis of radio-frequency silane and silane-nitrogen plasmas based on field ionization mass spectrometry
F. Okuyama, H. Hayashi, H. IwaiVolume:
246
Year:
1990
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(90)90062-c
File:
PDF, 59 KB
english, 1990