Influence of O2 and oxide on Cl/Si surface reactions
Nahomi Aoto, Eiji Ikawa, Takamaro Kikkawa, Yukinori KurogiVolume:
247
Year:
1991
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(91)90651-7
File:
PDF, 77 KB
english, 1991