Effects of surface plasma treatments in relation to electrical isolation in GaAs integrated circuits
J. Gual, R. Dkiouak, J. Samitier, J.R. Morante, A. Cornet, P. Boher, M. RenaudVolume:
251-252
Year:
1991
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(91)90853-j
File:
PDF, 60 KB
english, 1991