The reaction of atomic oxygen with Si(100) and Si(111) : I. Oxide decomposition, active oxidation and the transition to passive oxidation
J.R. Engstrom, D.J. Bonser, M.M. Nelson, Thomas EngelVolume:
256
Year:
1991
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(91)91188-3
File:
PDF, 73 KB
english, 1991