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Atomic layer etching chemistry of Cl2 on GaAs(100)
Audunn Ludviksson, Mingde Xu, Richard M. MartinVolume:
277
Year:
1992
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(92)90147-w
File:
PDF, 141 KB
english, 1992