The initial stages of diamond growth: an adsorption study of hot filament activated methane and hydrogen on Si(100)
Richard B. Jackman, Lye Hing Chua, John S. FoordVolume:
292
Year:
1993
Language:
english
Pages:
1
DOI:
10.1016/0167-2584(93)90846-b
File:
PDF, 65 KB
english, 1993