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Titanium disulfide films fabricated by plasma CVD
Keiichi Kanehori, Yukio Ito, Fumiyoshi Kirino, Katsuki Miyauchi, Tetsuichi KudoVolume:
18-19
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0167-2738(86)90269-9
File:
PDF, 326 KB
english, 1986