Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography
Hyun Wook Ro, Huagen Peng, Ken-ichi Niihara, Hae-Jeong Lee, Eric K. Lin, Alamgir Karim, David W. Gidley, Hiroshi Jinnai, Do Y. Yoon, Christopher L. SolesVolume:
20
Year:
2008
Language:
english
Pages:
6
DOI:
10.1002/adma.200701994
File:
PDF, 280 KB
english, 2008