The Patterning of Sub-500 nm Inorganic Oxide Structures
Meredith J. Hampton, Stuart S. Williams, Zhilian Zhou, Janine Nunes, Doo-Hyun Ko, Joseph L. Templeton, Edward T. Samulski, Joseph M. DeSimoneVolume:
20
Year:
2008
Language:
english
Pages:
7
DOI:
10.1002/adma.200702495
File:
PDF, 1020 KB
english, 2008