Pulse implantation doping - concentration profiles and surface morphology
Jerzy Piekoszewski, Zbigniew Werner, Jerzy Langner, Leszek Jakubowski, Cezary Pochrybniak, Agnieszka HarasiewiczVolume:
209-210
Year:
1983
Language:
english
Pages:
6
DOI:
10.1016/0167-5087(83)90841-4
File:
PDF, 440 KB
english, 1983