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A study of Ar implantation induced defects in SiO2
R.A.B. Devine, F. Ferrieu, A. GolanskiVolume:
209-210
Year:
1983
Language:
english
Pages:
6
DOI:
10.1016/0167-5087(83)90939-0
File:
PDF, 419 KB
english, 1983