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Experiments on X-ray lithography using synchrotron radiation from the VEPP-2M storage ring
E.S. Gluskin, A.A. Krasnoperova, G.N. Kulipanov, V.P. Naz'mov, V.F. Pindjurin, A.N. Skrinsky, V.V. ChesnokovVolume:
208
Year:
1983
Language:
english
Pages:
6
DOI:
10.1016/0167-5087(83)91156-0
File:
PDF, 472 KB
english, 1983