The Argonne inverted sputter source

Nuclear Instruments and Methods in Physics Research 1984 Vol. 220; Iss. 1

The Argonne inverted sputter source

J.L. Yntema, P.J. Billquist
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Volume:
220
Year:
1984
Language:
english
Pages:
2
DOI:
10.1016/0167-5087(84)90417-4
File:
PDF, 152 KB
english, 1984
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