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The effect of the source optics and the temperature of the sputter surface on the negative ion yield of the sputter source MISS-4M
H. Matthes, W. Pfestorf, L. SteinertVolume:
220
Year:
1984
Language:
english
Pages:
3
DOI:
10.1016/0167-5087(84)90419-8
File:
PDF, 188 KB
english, 1984