Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric
Maryam Moradi, Arokia Nathan, Hanna M. Haverinen, Ghassan E. JabbourVolume:
21
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/adma.200900757
File:
PDF, 446 KB
english, 2009