Fabrication of 3D Metamaterial Resonators Using...

Advanced Materials 2010 Vol. 22; Iss. 29

Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography

D. Bruce Burckel, Joel R. Wendt, Gregory A. Ten Eyck, A. Robert Ellis, Igal Brener, Michael B. Sinclair
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Volume:
22
Year:
2010
Language:
english
Pages:
5
DOI:
10.1002/adma.200904153
File:
PDF, 544 KB
english, 2010
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