Metal-Assisted Chemical Etching of Silicon: A Review : In...

Advanced Materials 2011 Vol. 23; Iss. 2

Metal-Assisted Chemical Etching of Silicon: A Review : In memory of Prof. Ulrich Gösele

Zhipeng Huang, Nadine Geyer, Peter Werner, Johannes de Boor, Ulrich Gösele
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Volume:
23
Year:
2011
Language:
english
Pages:
24
DOI:
10.1002/adma.201001784
File:
PDF, 1.85 MB
english, 2011
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