Shorter-wavelength lithography utilizing MRS-type negative...

Shorter-wavelength lithography utilizing MRS-type negative resists

Toshiharu Matsuzawa, Takao Iwayanagi, Hidehito Obayashi, Hideki Tomioka
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Volume:
1
Year:
1983
Language:
english
Pages:
12
DOI:
10.1016/0167-9317(83)90002-3
File:
PDF, 1.88 MB
english, 1983
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