Shorter-wavelength lithography utilizing MRS-type negative resists
Toshiharu Matsuzawa, Takao Iwayanagi, Hidehito Obayashi, Hideki TomiokaVolume:
1
Year:
1983
Language:
english
Pages:
12
DOI:
10.1016/0167-9317(83)90002-3
File:
PDF, 1.88 MB
english, 1983