Oxygen ion-beam etch resistance of metal-free and...

Oxygen ion-beam etch resistance of metal-free and organosilicon resist materials

Hiroshi Gokan, Yoshitake Ohnishi, Kazuhide Saigo
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Volume:
1
Year:
1983
Language:
english
Pages:
12
DOI:
10.1016/0167-9317(83)90015-1
File:
PDF, 727 KB
english, 1983
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