SIMS and AES investigations of contamination effects by RIE of PIQ layers
I.W. Rangelow, K. Maβeli, L. Niewöhner, R. Kassing, W. PilzVolume:
3
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0167-9317(85)90059-0
File:
PDF, 586 KB
english, 1985