Computer simulation of pattern profiles through physical etching with shadow, trenching, and redeposition
I.W. Rangelow, P. Thoren, R. KissingVolume:
3
Year:
1985
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(85)90078-4
File:
PDF, 857 KB
english, 1985