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High resolution e-beam lithography for X-ray mask making
S. Pongratz, K. Reimer, R. Demmeler, Ch. EhrlichVolume:
6
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(87)90026-8
File:
PDF, 314 KB
english, 1987