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Laser recrystallization of polysilicon on monocrystalline insulating substrates
Jan Haisma, Cor Langereis, Johan M.M. Pasmans, John E.J. SchmitzVolume:
8
Year:
1988
Language:
english
Pages:
16
DOI:
10.1016/0167-9317(88)90010-x
File:
PDF, 1.26 MB
english, 1988