Silicon-on-insulator by oxygen implantation: An advanced...

Microelectronic Engineering 1988 Vol. 8; Iss. 3-4

Silicon-on-insulator by oxygen implantation: An advanced technology

M. Bruel, J. Margail, C. Jaussaud, A.J. Auberton-Hervé, J. Stoemenos
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Volume:
8
Year:
1988
Language:
english
Pages:
13
DOI:
10.1016/0167-9317(88)90014-7
File:
PDF, 854 KB
english, 1988
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