Quality of microstructures produced by laser lithography and system performance
H. Ulrich, R.W. Wijnaendts-van-Resandt, N. Koop, M.v. Schickfuss, C. Rensch, W. EhrenspergerVolume:
9
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(89)90015-4
File:
PDF, 1.31 MB
english, 1989