Electron beam induced deposition in a reducing image...

Microelectronic Engineering 1989 Vol. 9; Iss. 1-4

Electron beam induced deposition in a reducing image projector

Michael Rüb, Hans W.P. Koops, Theo Tschudi
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Volume:
9
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(89)90059-2
File:
PDF, 596 KB
english, 1989
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