Microstructures of GaAs fabricated by finely focused ion...

Microelectronic Engineering 1989 Vol. 9; Iss. 1-4

Microstructures of GaAs fabricated by finely focused ion beam lithography

Takao Shiokawa, Pil Hyon Kim, Manabu Hamagaki, Tamio Hara, Yoshinobu Aoyagi, Koichi Toyoda, Susumu Namba
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Volume:
9
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0167-9317(89)90064-6
File:
PDF, 276 KB
english, 1989
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