An electron beam tester with field emission gun

Microelectronic Engineering 1989 Vol. 9; Iss. 1-4

An electron beam tester with field emission gun

J. Fiser, J. Hustak, V. Kolarik, A. Schenk
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Volume:
9
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0167-9317(89)90094-4
File:
PDF, 740 KB
english, 1989
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