A self comparison method to measure distortions of fine gratings and to characterize electron beam systems
Hans W.P. Koops, Yuli Vladimirsky, Michael Rüb, Rainer ErbVolume:
9
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(89)90098-1
File:
PDF, 400 KB
english, 1989