A self comparison method to measure distortions of fine...

A self comparison method to measure distortions of fine gratings and to characterize electron beam systems

Hans W.P. Koops, Yuli Vladimirsky, Michael Rüb, Rainer Erb
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Volume:
9
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(89)90098-1
File:
PDF, 400 KB
english, 1989
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